The lithography simulation group of Fraunhofer IISB provides outstanding expertise in the field of lithography simulation. The present activities of the group are focused on model and software development and on the application of lithography simulation for the development and optimization of optical and EUV projection lithography for semiconductor fabrication. The modeling of other lithographic techniques such as contact or proximity printing, near field lithography, interference exposures and holographic lithography becomes increasingly important as well. more...

Research Activities

Imaging Overview

Image Modeling

Resist Overview

Photoresist Modeling

EMF Overview

Rigorous Electromagnetic Field Modeling

Proximity Overview

Contact and Proximity Printing


Optimization Methods and Applications



Research and development work is done in cooperation with national and international industrial and academic partners. Present and former project partners include ASML, CNRS, GenIsys, IMEC, Infineon, LETI, Nikon, Sematech International, PTB, University of Texas in Austin, Vistec, Zeiss and others. more...

Dr.LiTHO Software

Dr.LiTHO is a comprehensive simulation environment for photolithography, developed at the Fraunhofer IISB. Its main focus is on development and research applications. more...


Selected research and development results are published in renowned journals such as JM3, at first class conferences, such as SPIE Advanced Lithography, BACUS, Photomask Japan, MNE, and at the international lithography simulation workshop which is organized by IISB. more...

Education and Jobs

Postdocs, PhD- and master students with background in the field of physics, computational or electrical engineering, mathematics, and chemistry are doing leading edge research and development in an international and multidisciplinary team. The participation of Fraunhofer IISB in the Erlangen Graduate School in Advanced Optical Technologies (SAOT), which has been established within the framework of the "Excellence Initiative by the German Federal and State Governments to Promote Science and Research at German Universities", provides extraordinary opportunities for PhD students and research work in the relevant field. more...